Transparent P-Type Layer with Highly Reflective Rh/Al P-Type Electrodes for Improving the Performance of AlGaN-based Deep-Ultraviolet Light-Emitting Diodes

Liubing Wang,Fujun Xu,Jing Lang,Jiaming Wang,Lisheng Zhang,Xuzhou Fang,Ziyao Zhang,Xueqi Guo,Chen Ji,Xiangning Kang,Ning Tang,Xinqiang Wang,Zhixin Qin,Weikun Ge,Bo Shen
DOI: https://doi.org/10.35848/1347-4065/acbf14
IF: 1.5
2023-01-01
Japanese Journal of Applied Physics
Abstract:We attempt to improve the light extraction of AlGaN-based deep-ultraviolet light-emitting diodes (DUV-LEDs) by introducing a highly transparent p-type layer together with reflective Rh/Al p-type electrodes. The p-GaN contact layer is thinned to balance the Ohmic contact and DUV light transmittance, which helps the Rh/Al p-type electrodes realize high reflection as well as good electrical performance. After optimization, the Rh/Al reflective p-type electrodes present reflectance of greater than 70% and specific contact resistivity of 3.75 x 10(-4) omega center dot cm(2). Due to the improvement in the light extraction efficiency, the highest wall-plug efficiency of 278 nm DUV-LEDs is improved by 57% compared to the conventional configuration with Ni/Au as the p-type electrodes.
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