High Responsivity Evanescently Coupled Waveguide Photodiode Using Spot-Size Converter and Distributed Bragg Reflector at 1.55 Μm Wavelength

Yingjian Liu,Kai Jiang,Zhongjun Jiang,Bojian Zhang,Danyang Luo,Yun Liu,Lujie Qu,Wen Liu,Liang Wang
DOI: https://doi.org/10.1016/j.infrared.2023.104619
IF: 2.997
2023-01-01
Infrared Physics & Technology
Abstract:InGaAs/InP waveguide photodiode, one of the most crucial devices in optical modules, has proven to be beneficial for exponential data communication. However, improving responsivity with a high 3 dB bandwidth remains a challenge for various photodetector designs. In this letter, a multi-layers SiO2/SiNx distributed Bragg reflector and a spot-size converter are both employed and improve responsivity by 61%. An optimized optical matching layer and a spot-size converter combined with the reflector lead to a 0.66 A/W responsivity at 1550 nm wavelength. 3 dB bandwidth of the device can achieve 85 GHz with a 3 mu m x 10 mu m active area. The responsivity improvement indicates a higher quantum efficiency and signal-to-noise ratio. It could be beneficial for high speed optical communication and other applications.
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