Abstract:The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd's mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd's mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating–microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments.

Multiple-beam Grating Interferometry and Its General Airy Formulae

Design of Large-Deflection-angle High-Diffraction-efficiency High-Dispersion Hybrid Gratings

Fabrication of a Two-Dimensional Diffraction Grating by a Two-Axis Lloyd's Mirror Interferometer

Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings

Generalized method for probing ideal initial polarization states in multibeam Lloyd's mirror interference lithography of 2D scale gratings

Long Focal-Length Measurement Using Divergent Beam and Two Gratings of Different Periods.

Design of Off-angle Beaming Device Based on Subwavelength Metal Thin Film Microstructure

Method to Mosaic Gratings That Relies on Analysis of Far-Field Intensity Patterns in Two Wavelengths

Bidirectional two-degree-of-freedom grating interferometer with biased Littrow configuration

Arbitrary Scanning of the Airy Beams Using Additional Phase Grating with Cubic Phase Mask

Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on Its Alignment Tolerance

Disentanglement of mixed interference fringes in optical interferometers: theory and applications

Measurement of Long Focal Lengths with a Double-Grating Interferometer

A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers

A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings

Linear Response, Multi-Order Grating Interferometry Using a Reversal Shearing Imaging System.

Two Degree-of-Freedom Fiber-Coupled Heterodyne Grating Interferometer with Milli-Radian Operating Range of Rotation

X-ray Interferometry Using a Modulated Phase Grating: Theory and Experiments

Theory and verification of moiréfringes for X-ray three-phase grating interferometer

Quantitative Coherence Analysis of Dual Phase Grating X-Ray Interferometry with Source Grating*

Analysis of the General Effects in Double-Grating Diffraction-Interference System