Large-Scale Arrays of Tunable Monolayer MoS<inf>2</inf> Nanoelectromechanical Resonators

Zuheng Liu,Luming Wang,Pengcheng Zhang,Maosong Xie,Yueyang Jia,Ying Chen,Hao Jia,Zenghui Wang,Rui Yang
DOI: https://doi.org/10.1109/MEMS49605.2023.10052324
2023-01-01
Abstract:We report on the first demonstration on scaled fabrication of electrically tunable monolayer molybdenum disulfide (MoS <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> ) nanoelectromechanical resonator arrays. A centimeter-sized monolayer MoS <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> film is grown by chemical vapor deposition (CVD), and then transferred onto the substrate with pre-patterned microtrench and electrode arrays, resulting in freely suspended nanoelectromechanical resonator arrays based on two-dimensional (2D) MoS <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> membranes. Raman and photoluminescence (PL) measurements confirm the monolayer thickness and uniformity of material properties. We experimentally demonstrate resonance excitation and detection, nonlinear resonances, as well as electrostatic frequency tuning, in these arrayed MoS <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> resonators. The resonators show resonance frequency tuning ranges (Δf/f <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</inf> ) up to 21%, as well as gate tuning of quality (Q) factors (|ΔQ/Q <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</inf> |) by up to 44%. These arrays of 2D nanoelectromechanical resonators can enable more complex circuits at large scale.
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