Actuator Saturation Compensator Design for Disturbance Observer Based Control Structure Supporting Piezo Driven Nanopositioning Systems.

Heng Liang,Kai Liu,Man Li,Peng Du
DOI: https://doi.org/10.1109/ICISCAE55891.2022.9927363
2022-01-01
Abstract:In this research, we developed a saturation compensator based disturbance observer control structure for piezo driven nanopositioning systems. By regarding the effects of hysteresis nonlinearities, model uncertainties, motion coupling and external disturbances as a lumped disturbance added to the control channel, a disturbance observer is established for the nanopositioning system for purpose of compensating the lumped disturbance, such that improved control performance is obtained for the unsaturated nanopositioning system. On top of the specific control structure of disturbance observer, a robust saturation compensator is employed to deal with the unexpected actuator saturations. On the basis of the input/output relationships, the compensator design is transformed as a control problem with the dead zone nonlinearity, which is constraint by a sector boundary. By combining the saturation compensation robustness with model uncertainties, we formulate the compensator design as an H∞ optimization problem. Experimental results on a prototype of the piezo driven nanopositioner demonstrate the excellent motion performance and saturation compensation capability of the proposed control strategy.
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