An Adaptive Tracking Measurement Method for Inner Surface of Laser Fusion Targets

Xianxian Ma,Zihao Liu,Jie Luo,Yijun Liu,Weiqian Zhao,Qi Wang,Lirong Qiu,Yun Wang
DOI: https://doi.org/10.1016/j.optlastec.2022.108938
2023-01-01
Abstract:We propose an adaptive tracking measurement method for accurate, rapid, and non-invasive measurement of the topography of the inner surface of fusion targets. During the first phase of the measurement, we measure the lowfrequency components of the inner surface of the target using a laser differential confocal axial point-by-point scanning measurement method with a large dynamic range. During to the second phase of the measurement, based on the low-frequency components data, the objective lens is driven by a scanner for adaptive large-interval movement, simultaneously, we measure the high-frequency components in the large-interval using a laser differential confocal linear sensing measurement method. Combined with the mutually perpendicular slewing shafts system, the three-dimensional topography of the inner surface of the target can be measured.
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