Design of Wide Load Class-E Inverters for Radio Frequency Plasma Generation

Min Sun,Yufei Wang,Dongsheng Cai,Siming Pan,Shunlin Liu,Yuchuan Peng,Qi Huang
DOI: https://doi.org/10.1109/icpet55165.2022.9918505
2022-01-01
Abstract:This paper presents a design method for wide load operation of high frequency Class-E inverters based on GaN power devices in radio frequency (RF) plasma generation applications. The mathematical model considering the reverse conduction of the Class-E inverter feeding any loads on the complex plane is introduced and the total power loss of the power switch could be calculated then. The safe operating area (SOA) of the Class-E inverter could be established based on the thermal limits of the power switch. With an impedance matching network, the varying plasma load could be transformed into the SOA of the Class-E inverter. Both simulation and experimental results verify the effectiveness of this design methodology.
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