Corrections to “A Temperature-Stable and Low Impedance Piezoelectric MEMS Resonator for Drop-in Replacement of Quartz Crystals” [sep 21 1382-1385]

Wen Chen,Wenhan Jia,Yuhao Xiao,Zhihong Feng,Guoqiang Wu
DOI: https://doi.org/10.1109/led.2022.3206819
IF: 4.8157
2022-01-01
IEEE Electron Device Letters
Abstract:In the above letter [1] , the authors would like to correct an error regarding the deduction of the unloaded quality factor ( ${Q}_{\textit {un}}{)}$ mentioned in the Abstract, Fig. 3(a) , Table I , and discussion associated with Fig. 3(a) and Table I . The frequency response of impedance is derived from the measured scattering (S) parameters. ${Q}_{\textit {un}}$ of the MEMS resonator should be deduced by converting the measured loaded quality factor ( ${Q}_{l}$ ) from the S parameters using the approach described in [2] . However, we misused the quality factor ( ${Q}$ ) derived from the converted impedance results, rather than that from the S parameters. We sincerely regret the error in our original letter.
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