Synthesis of Oxide Interface-Based Two-Dimensional Electron Gas on Si

Leyan Nian,Jiayi Li,Zhichao Wang,Tingting Zhang,Haoying Sun,Yueying Li,Tianyi Gao,Yu Deng,Yuefeng Nie,Yufeng Hao
DOI: https://doi.org/10.1021/acsami.2c18934
IF: 9.5
2022-01-01
ACS Applied Materials & Interfaces
Abstract:Two-dimensional electron gas (2DEG) at the interface of amorphous Al2O3/SrTiO3 (aAO/STO) heterostructures has received considerable attention owing to its convenience of fabrication and relatively high mobility. The integration of these 2DEG heterostructures on a silicon wafer is highly desired for electronic applications but remains challanging up to date. Here, conductive aAO/STO heterostructures have been synthesized on a silicon wafer via a growth-and-transfer method. A scanning transmission electron microscopy image shows flat and close contact between STO membranes and a Si wafer. Electron energy loss spectroscopic measurements reveal the interfacial Ti valence state evolution, which identifies the formation of 2D charge carriers confined at the interface of aAO/STO. This work provides a feasible strategy for the integration of 2DEG on a silicon wafer and other desired substrates for potential functional and flexible electronic devices.
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