Fabrication of Thin Solid Electrolytes Containing a Small Volume of an Li3OCl-type Antiperovskite Phase by RF Magnetron Sputtering

Stephen J. Turrell,Hyeon Jeong Lee,Marco Siniscalchi,Sudarshan Narayanan,Mauro Pasta,Susannah C. Speller,Chris R. M. Grovenor
DOI: https://doi.org/10.1039/d2ma00971d
2022-01-01
Materials Advances
Abstract:RF magnetron sputter deposition was performed using an Li2O + LiCl powder target. The resulting solid electrolyte films were found to contain a small volume fraction of an Li3OCl-type antiperovskite phase.
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