High Electromechanical Coupling SAW Resonators Based on a-Plane AlScN-AlN-Sapphire Substrate

Kai Yang,Fuhong Lin,Ziying Wu,Danyang Fu,Liang Wu,Chengjie Zuo
DOI: https://doi.org/10.1109/IC-MAM55200.2022.9855208
2022-01-01
Abstract:This work reports on surface acoustic wave (SAW) piezoelectric resonators with high electromechanical coupling coefficient (k(eff)(2)) based on a-plane Aluminum Scandium Nitride (AlScN) films. The properties of surface acoustic wave modes were analyzed using finite element modeling (FEM) simulations. The influences of AlScN film thickness and in-plane propagation orientation on k(eff)(2) were evaluated. Due to good crystallinity (FWHM < 1 degrees) and high Sc doping, optimized design parameters from FEM simulations were adopted to realize a high k(eff)(2) up to 5.17%, which is the highest among the reported AlScN SAW devices. These results demonstrate that the k(eff)(2) can be improved by using a-plane AlScN when compared to c-plane AlScN, which is highly needed for radio frequency (RF) filters.
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