Signal-Transformation-Based Tracking Control of Nano-positioning Stage with Kalman Filter

Yi-Lun Zhang,Xiang Huang,Hong-Wei Sun,Ming-Lei Yi,Hai-Tao Zhang
DOI: https://doi.org/10.23919/ccc55666.2022.9902538
2022-01-01
Abstract:This paper presents a novel dual-loop control scheme for the piezo-actuated nano-positioning stage to alleviate the influence of measurement noise in tracking control. In this scheme, a Kalman filter is employed to estimate optimal system states in the inner loop. Estimated system states are used for feedback damping controller design via a pole-placement method to suppress resonance. In the outer loop, a signal transformation approach is utilized along with a double integral controller to address projected noise as well as to eliminate tracking errors. Comparative tests are run on a self-designed piezo-actuated nano-positioning stage to substantiate the efficacy and superiority of the proposed method for high-precision tracking of triangular references.
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