Abrasion Resistance of Femtosecond Pulsed Laser Processed Micro Molds of Laser Shock Imprinting

Quan Liu,Xiaofeng Hu,Chenyu Su,Chen Zhang

DOI: https://doi.org/10.1016/j.surfcoat.2022.128879

2022-01-01

Abstract:Laser shock imprinting is highly efficient to manufacture functional thin films. However, the manufacturing process and the service life of the mold were the main issues that restrict its large-scale application. In this study, high-quality and high-precision periodic patterns were manufactured on aluminum foils of thickness 4 mu m by laser shock imprinting with femtosecond pulsed laser etched Si and SiC molds. It proved that the micro molds with different patterns fabricated by variant femtosecond pulsed laser were able to tailor the optical function performance of the films. The effects of shock imprinting times on the abrasion resistance of different material mold were studied. The SiC mold with higher hardness has better wear resistance. The reflection rate attenuation of the film based on the SiC mold was obviously smaller than that on the Si mold after 100 times of imprinting. The difference performance caused by different molds was analyzed by elastoplastic mechanics of finite element method. The higher hardness of SiC suffer less wear and plastic deformation in the imprinting process, so it can mitigate the mold microstructure size degradation, which fabricates more accurate surface microstructures on the aluminum foils. The SiC is more suitable for making laser shock imprinting mold for future large-scale in-dustrial application.