Design and experimental study of plasma device for accurate contour scanning

Xiang-tian Yang,Yu-han Zhang,Xing-yu Chen,Ming-lei Li,Xiao-xia Du,Hua Li
DOI: https://doi.org/10.1016/j.vacuum.2022.111442
IF: 4
2022-01-01
Vacuum
Abstract:Herein, a plasma device with precise and controllable sterilization range was designed. It comprises three parts: mechanical motion, visual, and plasma parts. The mechanical motion part comprises a three degree of freedom motion platform and a camera module. The overall unit size is 408 mm × 356 mm × 300 mm, and the effective movement area is 100 mm × 100 mm × 45 mm. For the visual part, the OpenMV module, an onboard STM32f767vit6 chip, and an ov5640 sensor are used for programming. After shooting, the image is set to a gray image matrix of 180 × 180 pixels. The plasma device is a single electrode helium plasma, and the produced active substances such as H2O2 and NO3− decrease with increasing moving speed of the moving platform. Through machine learning and control, the device realizes the accurate scanning of closed graphics with an edge thickness greater than 0.5 mm and the accurate sterilization of graphics with different shapes and areas.
What problem does this paper attempt to address?