Microstructure evolution and highly sensitive surface enhanced Raman scattering properties of self-formation dual-scale Ag nanoparticles/ Ag-Zr alloy film

Haoliang Sun,Xiaoxue Huang,Yuanjiang Lv,Fei Ma,Guangxin Wang,Akiyoshi Osaka

DOI: https://doi.org/10.1016/j.tsf.2022.139421

IF: 2.1

2022-01-01

Thin Solid Films

Abstract:Ag-22%Zr alloy films with different thicknesses were fabricated on flexible polyimide substrate by co-sputtering method. It is interested in finding that a lot of Ag nanoparticles are spontaneously formed on the as-deposited Ag-Zr films at room temperature. The phase, crystal structure, particle number and size, and surface enhanced Raman scattering (SERS) properties of as-deposited and annealed Ag-Zr alloy films were characterized by X-ray diffraction, high resolution transmission electron microscope, field emission scanning electron microscope and Raman spectrometer, respectively. Results show that Zr grains dispersed around Ag grains and had a coherent growth relation with Ag grains in the alloy film. Dual scale Ag nanoparticles were formed on the annealed Ag-Zr alloy films without template. An intense SERS effect was obtained by covering the Ag layer on the Ag-Zr alloy films. The SERS substrate showed good repeatability and revealed high sensitivity of enhancement factor with the detection limit concentration of Rhodamine 6G as low as 5 x 10-15 mol/L. It was demonstrated that the nanogaps between Ag nanoparticles behaved as hot spots, and thus enhanced local electromagnetic fields sub-stantially. Furthermore, densely and uniformly distributed Ag nanoparticles enlarged the surface roughness and the surface area, resulting in further enhanced Raman signals.