Silver Film Deposited Over Large-Area Self-Assembled Array Of Silica Nanospheres As Ultrasensitive Sers Substrate

Xu Hou,Qi Wang,Guoming Mao,Hao Liu,Xiaomin Ren
DOI: https://doi.org/10.1109/CLEOPR.2017.8118892
2017-01-01
Abstract:We have demonstrated an approach to prepare ultrasensitive surface enhanced Raman scattering (SERS) substrate via depositing Ag over silica (SiO2) nanospheres array template by magnetron sputtering. The nanospheres self-assembled on slightly-tilted silicon (Si) substrate with low-temperature thermal treatment. Large-area uniform Ag nanoclusters array was obtained with 40nm Ag covered the nanospheres (360nm in diameter). Ultrasensitivity was verified by successfully detection of Rhodamine 6G (R6G) with a limit of 10(-11)M.
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