Cascade GaN-based micro-photodiodes for photonic integration

Bin Wang,Shihao Liang,Junchi Yu,Feifan Xu,Dongqi Zhang,Tao Tao,Ting Zhi,Xiaoyan Liu,Zhe Zhuang,Zili Xie,Bin Liu,Rong Zhang
DOI: https://doi.org/10.1088/1361-6463/ac818a
2022-01-01
Abstract:Photonic integrated circuit have attracted increasing attentions in many applications, such as visible light communication (VLC), optical on-chip interconnects, etc. In this work, we focus the study on photonic integration of GaN-based light-emitting diode (LED) and photodiode (PD). Integrated LED and multi-stage cascade PDs were designed and fabricated. Experimental results have demonstrated that the equivalent capacitance decreases continuously as the number of PD stages increasing. Compared to a single PD, the four-stage cascade PD can reduce the equivalent capacitance by 60%, making the cut-off frequency increased by 37%. Meanwhile, the cascade technique greatly reduces the dark current down to 20 pA and further improves the photo-to-dark current ratio up to 1.2 x 10(6) under a negative 5 V bias. Thus, the finding and experimental results in this work could enable a noval method to further improve VLC performances of photonic integrated devices.
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