Effect of the Film Thickness on Electron Stimulated Desorption Yield from Ti-Zr-V Coating

Y. Gao,O. B. Malyshev,R. Valizadeh,J. Wang,A. Hannah,Y. C. Hu,J. Zhang,Q. Y. Sun,Q. Y. Si,S. Wang
DOI: https://doi.org/10.1088/1748-0221/17/08/p08025
2022-01-01
Journal of Instrumentation
Abstract:With the benefits of evenly distributed pumping, low thermal outgassing rate and low photon-/electron-/ion stimulated desorption yields, non-evaporable getter (NEG) coating has been widely used in particle accelerators for many years. Our earlier work has demonstrated the different thickness of Ti-Zr-V coating in the range of 0.1-1 mu m affects its pumping properties. In this study, the electron stimulated desorption (ESD) yields were studied for Ti-Zr-V coating deposited from a twisted target with its thickness less than 0.5 mu m, while an uncoated sample was also measured as a reference. The ESD yields for H-2, CH4, CO and CO2 were measured as a function of electron accumulated dose up to similar to 2 x 10(24) e(-)/m(2) followed bakeout/activation by heating to 80, 120, 140, 180 and 250 degrees C. After each ESD experiment the samples were full saturated with a mix of H-2, CO and CO2 . Both NEG coated samples demonstrate lower values in comparison to the uncoated one after heating/activation to temperatures up to 180 degrees C for H-2, up to 250 degrees C for CH4 , up to 140 degrees C for CO and 120 degrees C for CO2. The activation to 140 degrees C is the most efficient way to reach lower pressure and avoid quick aging of the NEG coating. The thinner NEG coating provides a significantly lower ESD yield in comparison to the thicker one only after activation to 180 degrees C, while their ESD yields are almost identical for each gas at the lower temperature.
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