Abstract:The linear translation stages play an important role in computer numerical control machine tools, coordinate measuring machines and semiconductor lithograph equipment. Six geometric motion errors are associated with a precision linear stage. High precision simultaneous measurement of multiple degrees of freedom is essential for the multiple-dimension motion calibration of the ultra-precision linear translation stage. In this paper, a laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulator is proposed. In this optical configuration, a stabilize single-frequency laser (f(0)) and two acousto-optic modulators are used to generate the laser source. The frequency shifts of the two AOMs are f(1) and f(2), respectively. The positive first order diffraction beams of two AOMs, f(0)+f(1) and f(0)+f(2), are merged into one orthogonally and linearly polarized beam with a frequency offset of (f(1)-f(2)) as the laser source for the roll measurement-unit. A half wave plate (HWP) is utilized as the roll sensing plate to magnify the tiny roll angle into an observable phase shift based on the change of polarization state. The resolution of the roll measurement system is determined by the amplification factor which can be enhanced by a multi-reflection cavity made of a specifically arranged assembly square pyramidal mirror and a folding mirror. The zeroth beam f(0) and the positive first order beam f(0)+f(1) provided by two AOMs forms two space separated beams for the displacement measurement, which can eliminate the periodic nonlinearity error. The optical system of the simultaneous measurement of displacement and roll angle were setup. The experimental results showed good repeatability and good consistency.

Laser Feedback Interferometer for Two-Dimensional Dynamic Displacement Measurement Based on Frequency Division Multiplexing Technique

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Quasi-common-path Laser Feedback Interferometry Based on Frequency Shifting and Multiplexing.

Experimental and theoretical study of displacement measurement based on frequency modulation optical feedback in a birefringence dual frequency laser

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Study on Displacement Measurement with Optical Feedback of Dual Frequency Laser

Nanometer-Resolution Displacement Measurement System Based on Weak Feedback Effect of Dual-Frequency Laser

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Self-Mixing Interferometry Cooperating with Frequency Division Multiplexing for Multiple-Dimensional Displacement Measurement

Parallel Multiplex Laser Feedback Interferometry.

Feedback Displacement Measurement System Using Dual-Frequency He-Ne Laser

Frequency-Shifted Optical Feedback Measurement Technologies Using a Solid-State Microchip Laser

A High-Resolution Displacement Sensor Based on Multiple Feedback Effect of Birefringence Dual Frequency Lasers

High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving

Quasi-Common-Path Laser Feedback Interferometers For Precision Measurement Of Non-Cooperative Targets

Displacement Sensors Based on Feedback Effect of Orthogonally Polarized Lights of Frequency-Split Hene Lasers

Laser Heterodyne Interferometer for Simultaneous Measurement of Displacement and Roll Angle Based on the Acousto-Optic Modulators

Effect of Dual-Channel Optical Feedback on Self-Mixing Interferometry System

Displacement Measurement Based on Polarization Hopping of Laser with Optical Feedback

Displacement Measurement Method Based on Integrated Grating Interferometry with Two-Wavelength Lasers

A Displacement Measuring System Based on Grating Double Diffraction