Abstract:Aluminum gallium arsenide (AlGaAs) and related III-V semiconductors have excellent optoelectronic properties. They also possess strong material nonlinearity as well as high refractive indices. In view of these properties, AlGaAs is a promising candidate for integrated photonics, including both linear and nonlinear devices, passive and active devices, and associated applications. Low propagation loss is essential for integrated photonics, particularly in nonlinear applications. However, achieving low-loss and high-confinement AlGaAs photonic integrated circuits poses a challenge. Here we show an effective reduction of surface-roughness-induced scattering loss in fully etched high-confinement AlGaAs-on-insulator nanowaveguides by using a heterogeneous wafer-bonding approach and optimizing fabrication techniques. We demonstrate ultrahigh-quality AlGaAs microring resonators and realize quality factors up to 3.52 × 106 and finesses as high as 1.4 × 104. We also show ultra-efficient frequency comb generations in those resonators and achieve record-low threshold powers on the order of ∼20 µW and ∼120 µW for the resonators with 1 THz and 90 GHz free-spectral ranges, respectively. Our result paves the way for the implementation of AlGaAs as a novel integrated material platform specifically for nonlinear photonics and opens a new window for chip-based efficiency-demanding practical applications.

Expanding the Quantum Photonic Toolbox with Low-Loss AlGaAs-on-Insulator

Expanding the quantum photonic toolbox in AlGaAsOI

Photonic Integrated Circuits and Components Using Quantum Well Intermixing

Photonic integrated circuits fabricated using quantum well intermixing

Quantum Well Intermixing For The Realization Of Photonic Integrated Circuits

Photonic-integrated circuits and components using quantum well intermixing

Aluminium Gallium Arsenide on Insulator for Integrated Quantum Photonics

A manufacturable platform for photonic quantum computing

Programmable quantum circuits in a large-scale photonic waveguide array

Quantum photonics hybrid integration platform

Engineering AlGaAs-on-insulator towards quantum optical applications

Ultrahigh-Q AlGaAs-on-insulator Microresonators for Integrated Nonlinear Photonics.

Advances in Chip‐Scale Quantum Photonic Technologies

High-speed thin-film lithium niobate quantum processor driven by a solid-state quantum emitter

Ultra-low loss quantum photonic circuits integrated with single quantum emitters

Electro-optic routing of photons from single quantum dots in photonic integrated circuits

High photon-loss threshold quantum computing using GHZ-state measurements

Gallium Arsenide (gaas) Quantum Photonic Waveguide Circuits

Pushing the limits on chip-scale quantum light generation for sensing and precision metrology

On-chip tunable quantum interference in a lithium niobate-on-insulator photonic integrated circuit

Electro-optic Routing of Photons from a Single Quantum Dot in Photonic Integrated Circuits