A novel cold-wall MOCVD method for fabrication of a durable micro-machined SnO2 gas sensor

T. Ide,K. Kikuchi,K. Nakamura,Y. Okajima

Abstract:A novel cold-wall metal organic chemical vapor deposition (MOCVD) method has been developed to fabricate a durable micro-machined SnO 2 thin-film gas sensor. Instead of using a hot plate or a heater around a reactor, a microheater fabricated using micromachining technology is put into the reactor and used as the heat source for thermal decomposition of the metal organic source. Since SnO 2 film is selectively deposited on the microheater using this method, no patterning process for the SnO 2 film is necessary. Moreover, the durability of the sensor fabricated using this method (N-sensor) is considerably improved compared with that of a sensor fabricated by a conventional hot-wall MOCVD method (C-sensor). The N-sensor outlasted over seven million heat cycles (500°C for 100 ms and room temperature for 100 ms), while the C-sensors were broken after a few hundred thousand heat cycles. Although the N-sensor demonstrated excellent durability, its sensitivity for methane gas was low. However, the sensitivity of the method may be improved by optimizing the deposition conditions.

Engineering,Materials Science