Abstract:A flexible thin‐film acoustic sensor with ultra‐broadband response capability is proposed. This device senses acoustic wave based on the triboelectric effect. With a spacer‐free structure and interlocking nanocolumn arrays design, the device can respond to acoustic signals in an ultrawide frequency range (100 Hz–4 MHz). The flexible and versatile device can be applied to laryngeal health monitoring, speech detection and ultrasonic diagnosis. Small‐scale and flexible acoustic probes are more desirable for exquisite objects like human bodies and complex‐shaped components than conventional rigid ones. Herein, a thin‐film flexible acoustic sensor (FA‐TES) that can detect ultra‐broadband acoustic signals in multiple applications is proposed. The device consists of two thin copper‐coated polyvinyl chloride films, which are stimulated by acoustic waves and contact each other to generate the triboelectric signal. Interlocking nanocolumn arrays fabricated on the friction surfaces are regarded as a highly adaptive spacer enabling this device to respond to ultra‐broadband acoustic signals (100 Hz–4 MHz) and enhance sensor sensitivity for film weak vibration. Benefiting from the characteristics of high shape adaptability and ultrawide response range, the FA‐TES can precisely sense human physiological sounds and voice (≤10 kHz) for laryngeal health monitoring and interaction in real‐time. Moreover, the FA‐TES flexibly arranged on a 3D‐printed vertebra model can effectively and accurately diagnose the inner defect by ultrasonic testing (≥1 MHz). It envisions that this work can provide new ideas for flexible acoustic sensor designs and optimize real‐time acoustic detections of human bodies and complex components.

High-sensitivity fiber-tip acoustic sensor with ultrathin gold diaphragm

Coherent OTDR Based Ultra-High Sensitive Acoustic Sensor Assisted with Distributed Microstructured Optical Fiber(DMOF) and Hollow Cylinder Transducer

Highly Sensitive and Fast Response Strain Sensor Based on Evanescently Coupled Micro/nanofibers

Single Optical Microfiber Enabled Tactile Sensor for Simultaneous Temperature and Pressure Measurement

Ultra-thin DLC diaphragm-based optical fiber sensor achieving a highly sensitive and broadband acoustic response

Ultracompact optical fiber acoustic sensors based on a fiber-top spirally-suspended optomechanical microresonator.

Ultra‐Broadband Flexible Thin‐Film Sensor for Sound Monitoring and Ultrasonic Diagnosis

Highly Sensitive Graphene Oxide-Based Fabry-Perot Low-Frequency Acoustic Sensor With Low-Coherence Polarized Demodulation Using Three-Step Phase-Shifting Arctan Algorithms

Ultrasensitive Skin-Like Wearable Optical Sensors Based on Glass Micro/nanofibers

Ultrasensitive detection of local acoustic vibrations at room temperature by plasmon-enhanced single-molecule fluorescence

An Acoustic Sensor Based on Active Fiber Fabry-Pérot Microcavities

A High-sensitivity, Small-size Resonant Pressure Microsensor Based on Optimized Resonator-diaphragm Structure.

High Sensitivity Fiber Acoustic Sensor Tip Working at 1550 Nm Fabricated by Two-Photon Polymerization Technique

Transparent microfiber Fabry-Perot ultrasound sensor with needle-shaped focus for multiscale photoacoustic imaging

Ultra-High-Sensitivity, Miniaturized Fabry-Perot Interferometric Fiber-Optic Microphone for Weak Acoustic Signals Detection

Broadband Acoustic Sensing with Optical Nanofiber Couplers Working at the Dispersion Turning Point

An Encapsulated Optical Microsphere Sensor for Ultrasound Detection and Photoacoustic Imaging

A High-Precision Miniature Triaxial FBG Force Sensor for Detecting Tissue Anomalies

High-Sensitivity EFPI-Based Acoustic Sensor Using in-Fiber Collimator and Adjustable 45° Mirror

Research on high-temperature characteristics of a miniature Fabry-Pérot cavity acoustic sensor.

High-Sensitivity Low-Frequency Fabry-Perot Ultrasonic Hydrophone With Chitosan Diaphragm