Abstract:Abstract With increasing concerns about noise pollution, the pursuit of highly dependable piezoelectric acoustic sensors for real‐time noise monitoring has come to the forefront of scientific research. Lead‐based perovskite piezoelectric films, exemplified by lead zirconate titanate Pb(Zr,Ti)O 3 (PZT), surpass traditional piezoelectric materials such as ZnO and AlN in their piezoelectric properties, promising substantial advancements in next‐generation acoustic sensor technologies. However, the toxic nature of lead in PZT materials poses formidable environmental and human health risks. In an unprecedented breakthrough, it presents the pioneering development of an environmentally benign lead‐free piezoelectric Micro‐Electro‐Mechanical System (MEMS) acoustic sensor based on potassium sodium niobate (K,Na)NbO 3 (KNN) film. High‐quality textured 3 μm‐thick KNN film is successfully integrated into commercially used Si substrate, rendering exceptional piezoelectricity (transverse piezoelectric coefficients e 31 * of ≈8.5 C m −2 ) with satisfactory thermal stability. The atomic‐scale Z ‐contrast imaging and piezoresponse force microscopy characterizations reveal that the outstanding piezoresponse originates from the local coexistence of multiple phases and the enhancement of extrinsic piezoelectric contributions from in‐plane polarization anisotropy. Finite element simulation is employed to design the triangular cantilever structure and annular diaphragm structure, each corresponding to different operating bandwidths. The resultant MEMS acoustic sensors stand out with outstanding acoustic performance (the high sensitivity and expansive receiving field of view), which are attributed to the microstructural engineering at multi‐length scales for the excellent piezoelectric properties of KNN film. These features enable sensitive acoustic monitoring in various environments, including large‐scale power grids and urban traffic.

Potassium‐Sodium‐Niobate‐Based Thin Films: Lead Free for Micro‐Piezoelectrics

(K,na)nbo3‐based Lead‐Free Piezoceramics: Fundamental Aspects, Processing Technologies, and Remaining Challenges

(K, Na)NbO 3 -based lead-free piezoceramics: Phase transition, sintering and property enhancement

Multi‐Length Engineering of (K, Na)NbO 3 Films for Lead‐Free Piezoelectric Acoustic Sensors with High Sensitivity

Multi‐Length Engineering of (K, Na)NbO3 Films for Lead‐Free Piezoelectric Acoustic Sensors with High Sensitivity

(K, Na)NbO3-based Lead-free Piezoceramics: Status, Prospects and Challenges

New K0.48Na0.52NbO3–Bi(Zn0.5Zr0.5)O3 Lead-Free Ceramics: Microstructure and Piezoelectricity

Technology Transfer of Lead-Free (K, Na)NbO3-based Piezoelectric Ceramics

Piezoelectricity of lead-free (K, Na)NbO3 nanoscale single crystals

Recent Developments in (K, Na)NbO3-Based Lead-Free Piezoceramics

Potassium sodium niobate (KNN) lead-free piezoceramics: A review of phase boundary engineering based on KNN materials

Phase Transition and Piezoelectricity of BaZrO3-modified (k,na)nbo3 Lead-Free Piezoelectric Thin Films

The structural origin of enhanced piezoelectric performance and stability in lead free ceramics

Sol‐gel Processed Highly (100)‐textured (K, Na)NbO3‐based Lead‐free Thin Films: Effect of Pyrolysis Temperature

(K,na)nbo3-Based Lead-free Piezoelectric Materials: an Encounter with Scanning Probe Microscopy

Electrical Performance and Conduction Mechanism of Potassium Sodium Niobate-Based Lead-Free Piezoceramics Via Two-Step Sintering Route

Preparation of KNN Based Lead-Free Piezoelectric Ceramics Via Composition Designing and Two-Step Sintering

Sintering of Lead-Free Piezoelectric Sodium Potassium Niobate Ceramics

Domain Evolution and Piezoelectric Response Across Thermotropic Phase Boundary in (K,na)nbo3-Based Epitaxial Thin Films

All-Inorganic Flexible (K, Na)NbO3-Based Lead-Free Piezoelectric Thin Films Spin-Coated on Metallic Foils.

High Piezoelectric Properties and High TC in KNN-Based Lead-Free Ceramics Sintered in Reducing Atmosphere