Design of <i>X</i>-<i>Y</i> Flexible Adjustment Mechanism for Moving Mirror in Lithographic Projection Objective

Yang Chao,Zhu Xianchang,Jin Chuan,Hu Song

DOI: https://doi.org/10.3788/LOP202259.0411002

2022-01-01

Laser & Optoelectronics Progress

Abstract:Aiming at the requirements of high precision, small stroke, and compact structure of X-Y direction adjustment mechanism of moving mirror in lithography projection objective, an X-Y direction integrated adjustment mechanism is proposed. Based on the four- bar adjustment principle, the proposed mechanism uses X-Y flexure hinges with independent inner and outer rings to realize high-precision adjustment in X/Y direction without decoupling. First, the structure design of the proposed mechanism is completed according to the adjustment accuracy and stroke of the moving mirror in the projection objective; then, the performance of the proposed X-Y flexible adjusting mechanism is simulated and analyzed by using the finite element analysis method. The analysis results show that the adjustment stroke of the mechanism is greater than +/- 20 mu m. The stiffness values in X direction and Y direction are 0. 542 mu m/N, 0. 671 mu m/N, respectively; the ratio of the vertical coupling error to the displacement in the main direction is 6. 86% and 4%, respectively; the mode is greater than 100 Hz. Finally, the performance test of the proposed adjustment mechanism is carried out, the repeated positioning accuracy in X direction and Y direction is 36. 3 nm and 41. 7 nm, respectively. During the adjustment process, the angle offset is less than 0. 5 ''. The experimental results show that the proposed flexible adjustment mechanism can meet the high-precision adjustment requirements of X-Y direction for image quality compensation of lithographic projection objective.