Frequency Tuning in Resonant Nano-Electromechanical Devices Based on Anisotropic Two-Dimensional Semiconductor Rhenium Disulfide

Fei Xiao,Bo Xu,Yachun Liang,Jiankai Zhu,Shenghai Pei,Ting Wen,Jing Li,Song Wu,Xia Juan,Zenghui Wang
DOI: https://doi.org/10.1109/EFTF/IFCS52194.2021.9604347
2021-01-01
Abstract:We demonstrate NEMS resonators based on anisotropic 2D semiconductor ReS2. The devices exhibit clear, electrically tunable mechanical resonances under both optothermal and electrostatic excitations, with frequency tuning range exceeding 100%. Our finding enables exploration of interplay between mechanical anisotropy and resonant responses in these atomically-thin semiconductors.
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