A dual sensing modes capacitive tactile sensor for proximity and tri-axial forces detection

Yen-Lin Chen,Yuanyuan Huang,Fuchi Shih,Tien Chou,Tung-Lin Chien,Rongshun Chen,Weileun Fang
DOI: https://doi.org/10.1109/mems51670.2022.9699713
2022-01-01
Abstract:This study designs and implements a capacitive-type dual-mode (proximity-sensing and force-sensing modes) tactile sensor (Fig.1) based on the TSMC 0.18 mu m 1P6M standard CMOS process. Merits of the dual-mode tactile sensor design are (Fig.2): (1) Proximity sensing mode: through fringe capacitance change between top electrodes, (2) Tri-axial forces sensing mode: through the gap-closing capacitance change between top and bottom electrodes. Thus, both conductive and non-conductive objects could be detected by capacitive proximity sensing, and normal/shear forces are decoupled by four capacitive sensing elements. Measurements show 4 mm sensing distance in proximity and less than 5% overall crosstalk in tri-axial force sensing.
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