Evolution and Mechanism of P-GaN Films Under Proton Irradiation and Its Influence on Electronic Device

Yun Tang,Lei Wang,Huiping Zhu,Xiaowu Cai,Xuewen Zhang,Jiantou Gao,Ningyang Liu,Xingji Li,Jianqun Yang,Fazhan Zhao,Bo Li
DOI: https://doi.org/10.1109/TNS.2021.3128533
IF: 1.703
2022-01-01
IEEE Transactions on Nuclear Science
Abstract:Electrical and optical properties deterioration of P-GaN films under 150 keV proton irradiation were investigated. Through the Hall measurement method, as the irradiation fluence increasing, the carrier concentration of P-GaN films decreases from 1.23 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times \,\,10^{{17}}$ </tex-math></inline-formula> to <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$-8.24\,\,\times \,\,10^{{16}}$ </tex-math></inline-formula> cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−3</sup> , and the carrier mobility change from 5.64 to 295.84 cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> /V/s. And through the circular transmission line model method, the sheet resistance and specific contact resistance for P-GaN films increased first and then decreased slightly under the proton irradiation. Radiation-induced <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{V}_{\mathrm {N}}$ </tex-math></inline-formula> , <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{Ga}_{\mathrm {i}}$ </tex-math></inline-formula> , <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{V}_{\mathrm {Ga}}$ </tex-math></inline-formula> , and <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\text{N}_{\mathrm {i}}$ </tex-math></inline-formula> were found to be responsible for the degradation of P-GaN films. It was confirmed that P-GaN has been transformed into N-GaN under the fluence of 1 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\times \,\,10^{15}$ </tex-math></inline-formula> p/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . The optical properties of the P-GaN films were characterized by examining changes in the photoluminescence spectrum. In addition, the electrical characteristics of Schottky barrier diode (SBD) and p-i-n diodes with the same structure (except for 0.5 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> P-GaN of p-i-n diode) were used to study the effect of P-GaN degradation on electronic device performance. When P-GaN was transformed into N-GaN, p-i-n diodes lost the electrical characteristics of the p-n junction and the <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${I}$ </tex-math></inline-formula> – <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> <tex-math notation="LaTeX">${V}$ </tex-math></inline-formula> curves of p-i-n diode are similar to that with SBD.
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