Mid-ir metamaterial absorber with polyvinylamine as a sensitive layer for on-chip sensing of carbon dioxide

Hong Zhou,Dongxiao Li,Xindan Hui,Xianming He,He Huang,Xiaojing Mu

DOI: https://doi.org/10.1109/TRANSDUCERS50396.2021.9495629

2021-01-01

Abstract:A miniaturized optical gas sensor is developed by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible metamaterial absorber with a gas-selective-trapping polyvinylamine (PVAm) for rapid and sensitive on-chip sensing of carbon dioxide. The implementation of carbon dioxide detection relies on the ingenious cooperation between metamaterials and PVAm, where PVAm functions as a sensitive layer to capture gas molecules and metamaterial absorber excites surface-enhanced infrared absorption to achieve sensitivity enhancement. We have experimentally demonstrated a minimum of 40 ppm detection limit on a small footprint (100 x 100 mu m(2)), showing great advantages in terms of both detection limit and size when compared with commercial IR gas sensors (>50 ppm at centimeters level). This work provides a valuable toolkit for carbon dioxide sensing as well as gains new insights into the successful system-level integration of miniaturized gas sensing platform.