Miniaturized two-chamber photoacoustic CO2 sensor with a wafer-bonded MEMS (micro-electro-mechanical systems) detector

Simon Gaßner,Simon Essing,David Tumpold,Katrin Schmitt,Jürgen Wöllenstein
DOI: https://doi.org/10.5194/jsss-13-219-2024
2024-08-03
Journal of Sensors and Sensor Systems
Abstract:The measurement of air quality, particularly the concentration of carbon dioxide (CO 2 ), has gained significant interest due to increased public health awareness. Elevated concentrations of CO 2 in the air have been linked to negative effects on cognitive functions and directly correlate with the quality of indoor air. This work presents the prototype of a miniaturized sensor module designed for sensing CO 2 concentrations in the air. The sensor module utilizes the two-chamber photoacoustic concept and features a compact design combining an absorption cell with a wafer-bonded detector based on silicon MEMS (micro-electro-mechanical systems) microphone technology. The CO 2 -filled detector chip uses the photoacoustic effect and is able to detect pressure oscillations within an enclosed volume generated by the absorption of modulated infrared (IR) light by CO 2 molecules. The complete sensor module measures only 9×13×7.8 mm 3 and the used detector chip is the smallest detector for two-chamber photoacoustic sensors reported to date. Experimental characterization showed that the prototype achieves a detection limit of 81 ppm CO 2 and exhibits a response time τ 63 of 53 s. The compact size and performance characteristics make the proposed sensor module suitable for applications in indoor air quality monitoring.
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