Abstract:In recent years, silicon-on-insulator substrates have been utilized for high-speed and low-power electronic components. Because of the high refractive index contrast of the silicon wire, its photonic device footprint can be significantly reduced. Moreover, the silicon photonic process is compatible with a complementary metal-oxide-semiconductor fabrication, which will benefit the high-density optoelectronic integrated circuits development. Researchers have recently proposed using the microring resonator (MRR) for label-free biosensing applications. The high-quality factor caused by the substantial electric field enhancement within the ring makes the MRR a good candidate for biomolecule detection under low analyte concentration conditions. This paper proposes an MRR chip to be a biosensor on the silicon platform through the relative displacement between the spatial ring-down interferograms at various cladding layers. The higher-order ring-down of the spatial interference wave packet will enhance the biosensing sensitivity after optimizing the coupling, MRR length, and the optical source bandwidth at the fixed optical waveguide loss. Finally, a typical sensitivity of 642,000 nm per refractive index unit is demonstrated under 0.1 μW minimum optical power detection for an MRR with a 100 μm radius. Higher sensitivity can be executed by a narrow bandwidth and lower silicon wire propagation loss.

Highly Sensitive Integrated Photonic Sensor and Interrogator Using Cascaded Silicon Microring Resonators

Photonic Sensor and Miniature Interrogator Based on Cascaded Silicon Microring Resonators.

High-sensitivity silicon photonic biosensors based on cascaded resonators

Intensity-Interrogated Sensor Based on Cascaded Fabry–Perot Laser and Microring Resonator

Highly-Sensitive Silicon-On-Insulator Sensor Based on Two Cascaded Micro-Ring Resonators with Vernier Effect

Analysis and Design of Refractive Index Biosensors Based on Single Silicon Nanobeam Cavity

On-Chip Integrated Interrogator Based on Silicon Microring Resonator

High-sensitivity Optical Sensors Based on Cascaded Reflective MZIs and Microring Resonators

Ultrasensitive Silicon Photonic Refractive Index Sensor Based on Hybrid Double Slot Subwavelength Grating Microring Resonator

Optical Sensors Based on Cascaded Micro-Ring Resonators with Thermo-Optical Tuning

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Highly-sensitive Optical Waveguide Sensor Based on SiON Using Two Cascaded-Microring Resonators

An Integrated Optical Sensor Based on Cascaded Polarization Convertor and Slot Waveguide Microring Resonator

Tunable Microring Based On-Chip Interrogator for Wavelength-Modulated Optical Sensors

High-Sensitivity and Wide-Range Optical Sensor Based on Three Cascaded Ring Resonators

Integrated Optical Chemical Sensor Based on an SOI Ring Resonator Using Phase-Interrogation

Sensitivity Enhancement of Group Refractive Index Biosensor through Ring-Down Interferograms of Microring Resonator

High-Sensitivity Refractive Index Sensing Based on Fano Resonances in a Photonic Crystal Cavity-Coupled Microring Resonator

Suspended Slotted Photonic Crystal Cavities for High-Sensitivity Refractive Index Sensing

Novel optical sensor based on the silicon crossing-coupled microring resonator

Microring resonator based on polarization multiplexing for simultaneous sensing of refractive index and temperature on silicon platform