Influence of Kinematic Characteristics on Grinding Ultra-Precision Substrates

Pei-Lum Tso,Chieng-Chung Teng
DOI: https://doi.org/10.1115/imece1999-0700
1999-01-01
Abstract:This study concerns with the kinematic characteristics of grinding ultra-precision substrate with the rotary-table vertical-spindle surface grinder. The relative position, velocity, acceleration of single grain on cup-wheel traveling along the substrate have been calculated and studied. Factors affecting the flatness of the ground substrate may be considered as: the non-uniformity of relative velocity, the non-uniformity of relative acceleration, the passing ratio of center to periphery of the substrate, the mean thickness of undeformed chip. These are influenced considerably by the value of the rotational speed ratio of cup-wheel and worktable as well as the wheel infeed rate. The experimental study indicated that the passing ratio is the main factor and the inclination of grinding wheel axis must be appropriately performed to improve the flatness of ground substrate.
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