Manufacture Protocol for the Control of Epsilon-Near-Zero Properties in Indium Tin Oxide Nanolayer at Telecommunication Wavelength

Yanhua Sha,Jiaye Wu,Jie Chen,Shengdong Zhang,Qian Li
DOI: https://doi.org/10.1364/fio.2021.jw7a.30
2021-01-01
Abstract:We experimentally demonstrate the tuning of the epsilon-near-zero (ENZ) properties in indium tin oxide (ITO) film by direct-current magnetron sputtering, and present a stable method to produce ITO films with ENZ point at telecommunication wavelength.
What problem does this paper attempt to address?