Precise Positioning and Defect Detection of Semiconductor Chip Based on Microvision

Xu Zhao,Yingjian Wang,Lianpeng Li,Fuchao Liu
DOI: https://doi.org/10.1007/978-981-16-9247-5_35
2022-01-01
Abstract:This paper proposes a high-precision chip positioning and defect detection technology based on machine vision. Divided into low-high double precision detection process, the probe are roughly aligned with the initial test point at low magnification, the fine alignment and feature detection at high magnification. First, the chip image was pre-processed at a low magnification to obtain the MER, and the orientation of the initial test point was obtained by the template matching method, the rough position of the probe tip was obtained by Harris detection. At high magnifications, an improved positioning algorithm is used to obtain the sub-pixel coordinates of the center of the test point and the probe tip. Combined with the clustering method, the row and column spacing of the test point array is obtained. At the same time, the characteristics of test points are extracted in the test point detection process and compared with the standard database to detect defects.
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