Abstract:Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years1-5. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes6-18, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations1-3,19-21, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications22-24. Stacks of van der Waals superconductor heterostructures comprising many layers and several blocks of two-dimensional materials have been grown in a highly controllable manner at a wafer scale using a high-to-low temperature strategy.

One-step Synthesis of Van Der Waals Heterostructures of Graphene and Two-Dimensional Superconducting Α−mo2c

One-step synthesis of van der Waals heterostructures of graphene and 2D superconducting a-Mo2C

Strongly Coupled High-Quality Graphene/2D Superconducting Mo2C Vertical Heterostructures with Aligned Orientation.

Strongly Coupled High-Quality Graphene/2D Superconducting Mo2C Vertical Heterostructures with Aligned Orientation

One-Step Synthesis of Metal/Semiconductor Heterostructure NbS2/MoS2

Stack Growth of Wafer-Scale Van Der Waals Superconductor Heterostructures

An Air-Stable and Atomically Thin Graphene/Gallium Superconducting Heterostructure

Two-dimensional Spinodal Interface in One-Step Grown Graphene-Molybdenum Carbide Heterostructures

Epitaxial Growth of Two-Dimensional Magnetic Lateral and Vertical Heterostructures

Van der Waals heterostructures with one-dimensional atomic crystals

Resonant Scattering in Proximity‐Coupled Graphene/Superconducting Mo2C Heterostructures

Creation of a two-dimensional polymer and graphene heterostructure

Two-Dimensional Van Der Waals Superconductor Heterostructures: Josephson Junctions and Beyond

Scalable synthesis of 2D van der Waals superlattices

Two-dimensional van der Waals: Characterization and manipulation of superconductivity

Printable two-dimensional superconducting monolayers

Peeling off Nanometer‐Thick Ferromagnetic Layers and Their Van Der Waals Heterostructures

One-Pot Confined Epitaxial Growth of 2D Heterostructure Arrays

Strong interlayer coupling and long-lived interlayer excitons in two-dimensional perovskite derivatives and transition metal dichalcogenides van der Waals heterostructures

The fabrication and physical properties of two-dimensional van der Waals heterostructures

Two Step Chemical Vapor Deposition of In2se3/Mose2 Van Der Waals Heterostructures