Abstract:Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years1-5. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes6-18, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations1-3,19-21, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications22-24. Stacks of van der Waals superconductor heterostructures comprising many layers and several blocks of two-dimensional materials have been grown in a highly controllable manner at a wafer scale using a high-to-low temperature strategy.

Two-Dimensional Van Der Waals Superconductor Heterostructures: Josephson Junctions and Beyond

Recent progress in 2D van der Waals heterostructures: fabrication, properties, and applications

The fabrication and physical properties of two-dimensional van der Waals heterostructures

Van der Waals ferromagnetic Josephson junctions

Two-dimensional van der Waals: Characterization and manipulation of superconductivity

Van der Waals heterostructures with one-dimensional atomic crystals

Steering on Degrees of Freedom of 2D Van Der Waals Heterostructures

Progress and challenges in the synthesis of two-dimensional Van der Waals ferroic materials and heterostructures

Tuning and exploiting interlayer coupling in two-dimensional van der Waals heterostructures

2D materials and van der Waals heterostructures

Van der Waals heterostructures for high-performance device applications: challenges and opportunities

Superconductor/Ferromagnet Heterostructures: A Platform for Superconducting Spintronics and Quantum Computation

Van der Waals Heterostructures by Design: From 1D and 2D to 3D

Stack Growth of Wafer-Scale Van Der Waals Superconductor Heterostructures

Superlattices based on van der Waals 2D materials

Van Der Waals Magnets: Wonder Building Blocks for Two‐dimensional Spintronics?

Fabrication and Applications of van der Waals heterostructures

2D Heterostructures for Ubiquitous Electronics and Optoelectronics: Principles, Opportunities, and Challenges

Heterodimensional superlattices based on two-dimensional materials

Emergent Phenomena in Magnetic Two-Dimensional Materials and van der Waals Heterostructures

Devices and Applications of Van Der Waals Heterostructures