Abstract:Strong field confinement, long-lifetime resonances, and slow-light effects suggest that metasurfaces are a promising tool for nonlinear optical applications. These nanostructured devices have been utilized for relatively high efficiency solid-state high-harmonic generation platforms, four-wave mixing, and Raman scattering experiments, among others. Here, we report the first alldielectric metasurface to enhance harmonic generation from a surrounding gas, achieving as much as a factor of 45 increase in the overall yield for Argon atoms. When compared to metal nanostructures, dielectrics are more robust against damage for high power applications such as those using atomic gases. We employ dimerized highcontrast gratings fabricated in silicon-on-insulator that support bound states in the continuum, a resonance feature accessible in broken-symmetry planar devices. Our 1D gratings maintain large mode volumes, overcoming one of the more severe limitations of earlier device designs and greatly contributing to enhanced third- and fifth-harmonic generation. The interaction lengths that can be achieved are also significantly greater than the 10’s of nm to which earlier solid-state designs were restricted. We perform finite-difference time-domain simulations to fully characterize the wavelength, linewidth, mode profile, and polarization dependence of the resonances. Our experiments confirm these predictions and are consistent with other nonlinear optical properties. The tunable wavelength dependence and quality factor control we demonstrate in these devices make them an attractive tool for the next generation of high-harmonic sources, which are anticipated to be pumped at longer wavelengths and with lower peak power, higher repetition rate lasers.

III-V Dielectric Metasurfaces: Enhanced Nonlinearities and Emission Control

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Tunable unidirectional nonlinear emission from transition-metal-dichalcogenide metasurfaces

Nonlinear Fano-Resonant Dielectric Metasurfaces.

Light-Emitting Metasurfaces: Simultaneous Control of Spontaneous Emission and Far-Field Radiation

Nonlinear van der Waals metasurfaces with resonantly enhanced light generation

Electro-optically Modulated Nonlinear Metasurfaces

Manipulation of Quantum Dot Emission with Semiconductor Metasurfaces Exhibiting Magnetic Quadrupole Resonances.

Enhanced light emission by magnetic and electric resonances in dielectric metasurfaces

Nonlinear dielectric geometric-phase metasurface with simultaneous structure and lattice symmetry design

Second-harmonic and sum-frequency generation from dielectric metasurfaces empowered by multiple quasibound states in the continuum

Second Harmonic Generation in Monolithic Lithium Niobate Metasurfaces.

Enhanced harmonic generation in gases using an all-dielectric metasurface

Surface Enhanced Nonlinear Optics Using Lithography-Free Metasurfaces

Spectral tuning of high-harmonic generation with resonance-gradient metasurfaces

Nonlinear Conversion Using Fano-Resonant All-Dielectric Metasurfaces

Active Control of Highly Efficient Third-Harmonic Generation in Ultrathin Nonlinear Metasurfaces

Resonantly tunable second harmonic generation from lithium niobate metasurfaces

Enhancing the Three-Photon Luminesce via the Resonance in Lead Halide Perovskite Metasurfaces

Externally driven nonlinear time-variant metasurfaces