Numerical Simulation and Experiment of a MEMS Ultrasonic Cavitation Model

Zihong Liu,Hui You,Liangchao Li,Ronghui Lin,Ping Zhang
DOI: https://doi.org/10.1088/1757-899x/739/1/012036
2020-01-01
IOP Conference Series Materials Science and Engineering
Abstract:This paper aims at analyzing the microbubble ultrasonic cavitation from the designed Bowl-shaped piezoelectric transducer in a micro channel. The cavitation conditions were derived and three methods of analysis were employed: (i) numerical analysis of piezoelectric parameters for the bubble cavitation using 2D piezo-acoustic coupling modelling. (ii) numerical analysis of microbubble dynamics and activities under ultrasound irradiation using 2D CFD simulation. (iii) experimental analysis of ultrasonic cavitation using designed micro-fluid chip by acoustic chemistry method. With the cavitation condition, the cavitation phenomenon of a lone micro bubble was analysed by the classic mathematical modelling, by which the piezoelectric transducer was optimized for ultrasonic cavitation in the micro channel. From the CFD results, the velocity of acoustic streaming increased to 58.6m/s, and the movement of the bubble wall was affected by the ultrasonic characters, which was in good agreement with the literature. The ultrasonic cavitation was proved to exist in the micro channel by the acoustic chemistry experiment.
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