Topography of Integrated Circuits Detected by Phase Selection in Modulated Optical Reflectance Microscopy

H. S. Li,S. Y. Zhang,J. C. Cheng,Q. Shen,Y. S. Lu
DOI: https://doi.org/10.1007/978-3-540-47269-8_94
1992-01-01
Abstract:The development of semiconductor industry has promoted the improvement of the inspection techniques which can be used for evaluating semiconductor materials and devices. In recent years, the modulated optical reflectance (MOR) technique has attracted great interest because it is a simple, direct and sensitive evaluation method in addition to its noncontact, nondestructive and non-invasive mode.
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