Abstract:This paper presents a design study of a four-probe optical sensor head for a three-axis surface encoder with a mosaic scale grating. As the mosaic scale grating, multiple two-dimensional reflective-type scale gratings are aligned in a matrix on a plane so that measurement ranges of the three-axis surface encoder along the X- and Y-axes can be extended. An optical layout for a four-probe unit, which consists of a laser diode and two beam splitters, was designed based on geometrical optics so that four probes aligned in the matrix can be generated. The designed four-probe unit was integrated into the optical sensor head of the three-axis surface encoder. Interference signals generated by the superimposition of diffraction beams from the XY gratings were utilized in the three-axis surface encoder so that the translational displacement motions of the mosaic scale grating along the X-, Y- and Z-axes can be detected simultaneously by each probe in the four probes. Experiments were carried out to verify the feasibility of both the designed four-probe optical sensor head and the proposed concept of the mosaic scale grating for expanding the measurement range of the three-axis surface encoder along the X- and Y-directional primary axes of motion. Measurement sensitivity of each probe was compared, and its compensation was carried out by linear matrix calculations. Measurement resolution and nonlinearity of each probe were also investigated. In addition, XYZ-directional translational motions of a linear stage when a long-range translational motion along the X-axis was given to the mosaic scale grating were measured by stitching the measured results by the four probes.

C019 Investigation and reduction of crosstalk errors in a six-degree-of-freedom surface encoder for a planar motion stage

Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage

A High-Precision Five-Degree-Of-Freedom Measurement System Based on Laser Collimator and Interferometry Techniques

Study of the Method for Measuring Four-Degree-of-Freedom Geometric Errors of a Linear Stage

Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide.

Reduction in Cross-Talk Errors in a Six-Degree-of-Freedom Surface Encoder

A Six-Degree-of-freedom Surface Encoder for Precision Positioning of a Planar Motion Stage

Four Degree-Of-Freedom Geometric Error Measurement System with Common-Path Compensation for Laser Beam Drift

Measurement of Six-Degree-Of-Freedom Planar Motions by Using A Multiprobe Surface Encoder

A Liquid-Surface-Based Three-Axis Inclination Sensor for Measurement of Stage Tilt Motions

Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range

Crosstalk Decoupling Measurement Method to Determine the Six Degrees of Freedom of Motion Error of Linear Stages

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Design and Testing of a Four-Probe Optical Sensor Head for Three-Axis Surface Encoder with a Mosaic Scale Grating

Measurement Uncertainty Evaluation of the Three Degree of Freedom Surface Encoder

Design and Construction of a Two-Degree-of-freedom Linear Encoder for Nanometric Measurement of Stage Position and Straightness

Position and Out-Of-Straightness Measurement of A Precision Linear Air-Bearing Stage by Using A Two-Degree-Of-Freedom Linear Encoder

A Sub-Nanometric Three-Axis Surface Encoder With Short-Period Planar Gratings For Stage Motion Measurement

Three-degrees-of-freedom Precision Stage

A compact design of optical scheme for multi-axis positioning surface encoders

A New 6-Degree-of-freedom Measurement Method of X-Y Stages Based on Additional Information