MoS2 Hybrid Integrated Micro-Ring Resonator Phase Shifter Based on a Silicon Nitride Platform

Zexing Zhao,Ziming Zhang,Jiatong Li,Zhenyuan Shang,Guoqing Wang,Jinde Yin,Hao Chen,Kai Guo,Peiguang Yan
DOI: https://doi.org/10.1364/ol.447492
IF: 3.6
2022-01-01
Optics Letters
Abstract:We demonstrate a low-power, compact micro-ring phase shifter based on hybrid integration with atomically thin two-dimensional layered materials, and experimentally establish a low-loss silicon nitride platform. Using a wet transfer method, a large-area few-layer MoS2 film is hybrid integrated with a micro-ring phase shifter, leading to a tuning efficiency of 5.8 pm V-1 at a center wavelength of 1545.294 nm and a half-wave-voltage-length product as low as 0.09 V cm. Our device is designed to provide a hybrid-integration-based active phase modulation scheme for integrated optical communication networks with large-cross-section silicon nitride waveguides. (C) 2022 Optica Publishing Group
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