A Silicon Recording Probe with Integrated Ag/Agcl Reference Electrode for In-Situ PH Sensing

Longchun Wang,Zhejun Guo,Bowen Ji,Ye Xi,Bin Yang,Jingquan Liu
DOI: https://doi.org/10.1109/transducers50396.2021.9495445
2021-01-01
Abstract:This paper presents a silicon recording probe with integrated in-situ Ag/AgCl reference electrode (ISA/ARE) for simultaneous pH sensing and electrophysiology recordings for the application neuroscience. The preparation of in-situ silver layer and its chlorination are realized by a constant current electrochemical plating method. The repeatable Ag/AgCl layer with stable potential has been verified by X-ray diffraction and electrochemical measurements. Meanwhile, the pH sensitivity of the combination of Iridium oxide (IrO x ) electrodes and ISA/ARE is 54.7mV/pH. The area of ISA/ARE is only 7000µm 2 , which is highly compatible with the preparation process of silicon probes, and is suitable for integration into the front of micro shanks as an in-situ detection reference. In short, the unique fabrication method to realize miniaturized and integrated in-situ reference electrode is of great significance to biosensors.
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