Abstract:Zoom mirror is a kind of active optical component that can change its curvature radius dynamically. Normally, zoom mirror is used to correct the defocus and spherical aberration caused by thermal lens effect to improve the beam quality of high power solid-state laser since that component was invented. Recently, the probable application of zoom mirror in realizing non-moving element optical zoom imaging in visible band has been paid much attention. With the help of optical leveraging effect, the slightly changed local optical power caused by curvature variation of zoom mirror could be amplified to generate a great alteration of system focal length without moving elements involved in, but in this application the shorter working wavelength and higher surface figure accuracy requirement make the design and fabrication of such a zoom mirror more difficult. Therefore, the key to realize non-moving element optical zoom imaging in visible band lies in zoom mirror which could provide a large enough saggitus variation while still maintaining a high enough surface figure. Although the annular force based actuation could deform a super-thin mirror having a constant thickness to generate curvature variation, it is quite difficult to maintain a high enough surface figure accuracy and this phenomenon becomes even worse when the diameter and the radius-thickness ratio become bigger. In this manuscript, by combing the pressurization based actuation with a variable thickness mirror design, the purpose of obtaining large saggitus variation and maintaining quite good surface figure accuracy at the same time could be achieved. A prototype zoom mirror with diameter of 120mm and central thickness of 8mm is designed, fabricated and tested. Experimental results demonstrate that the zoom mirror having an initial surface figure accuracy superior to 1/50 lambda could provide at least 21um saggitus variation and after finishing the curvature variation its surface figure accuracy could still be superior to 1/20 lambda, which proves that the effectiveness of the theoretical design.

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