Research on precision turning technology for microwave cavity modulation structure

Xicong Zou,Xinchun Xie,Xuesen Zhao,Zengqiang Li,Tao Sun

2016-01-01

Abstract:Terahertz microwave devices have been widely applied in the field of communication engineering, detection and medical treatment, to further match the increasingly higher requirements of power, efficiency and frequency band, the machining accuracy of microwave devices need to be improved correspondingly. The processing technic of existing microwave devices cannot exactly match the accuracy requirement, especially for the slow wave structure which is the core components of microwave devices, therefore high-precision machining technology should be proposed. It is difficult to achieve high-accuracy machining for the sine modulation structure inside a cavity which has high depth-to-width ratio, with respect to the issue of low-accuracy machining, in this paper the precision SPDT (single point diamond turning) technology was employed to meet the high-accuracy requirements for the microwave cavity modulation structure. The method of equal-chord length in the linear interpolation model was adopted to optimize the way of generating discrete points, which can greatly improve machining efficiency. In addition, the spline interpolation mode was discussed and the cubic uniform B-spline interpolation arithmetic for trajectory planning was employed to further improve the contour approximation accuracy, at the same time the influence of tool-setting was took into consideration. Finally, a series of cutting experiments of microwave cavity modulation structure were carried out in a home-made ultra-precision diamond turning machine and the Taylor Hobson Talysurf PGI 1240 was used for accuracy measurement of machined workpiece. The experiment result demonstrated that the spline interpolation is a better way for sine structure and the cutting parameters play an important role in the machining accuracy.