Nanoparticle Characterization by Automated Acquisition and Analysis of Images and EDS Data in the TEM

Roger Maddalena,Herman Lemmens,Yuri Rikers,Lin Jiang,Min Wu,Meghna Hukeri,Maarten Wirix
DOI: https://doi.org/10.1017/s1431927621006620
IF: 4.0991
2021-01-01
Microscopy and Microanalysis
Abstract:Getting meaningful statistics on size, shape, composition and location of nanoparticles is typically a tedious task given the small amount of particles that can be measured manually in a practical time frame. This also means that operator bias can become a serious issue. In this study a workflow is presented where the acquisition of the STEM images and the EDS data on a user-selected region is automated. A large area can be mapped by making a mosaic of individual frames with each frame being analyzed while the next frame is being recorded. In this way it becomes possible to get statistical data on roughly 500 particles per hour. The actual throughput depends mostly on the number of particles per unit area. This nanometer-sized precipitates samples by the method though some the spatial inevitably lost. Samples with a PlasmaFIB electropolishing an region is created across multiple statistical analysis of precipitates including their
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