Phase Measurement System for Meta-Lens

Mu-Ku Chen,Maoxiong Zhao,Ze-peng Zhuang,Yongfeng Wu,Xiaoyuan Liu,Yan Yue,Jingcheng Zhang,Jiaqi Yuan,Zhengnan Zhang,Shumin Xiao,Lei Shi,Jian-Wen Dong,Jian Zi,Din Ping Tsai
DOI: https://doi.org/10.1117/12.2594515
2021-01-01
Abstract:In recent years, Meta-lens has become a new type of optical device, showing excellent performance and novel applications. The nanoantennas of meta-lens can be used to control the phase, amplitude, and polarization at well. The phase part is the most important part of the function of the meta-lens. However, so far, the phase distribution of meta-lenses has not been directly measured, which further hinders the quantitative evaluation of their performance. We have developed an interferometric imaging phase measurement system for meta-lens and meta-devices. This system can measure the phase distribution by shooting the interference pattern. The phase distribution of meta-lenses can be measured to quantitatively characterize the imaging performance. Our meta-lens phase measurement system can help for designers to optimize the design, for manufacturers to identify defects, thereby improving the manufacturing process. This work will pave the way for meta-lens in industrial applications.
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