Abstract:Macroscopic models for the equilibrium of a three-component electronegative gas discharge are developed. Assuming the electrons and the negative ions to be in Boltzmann equilibrium, a positive ion ambipolar diffusion equation is derived. Such a discharge can consist of an electronegative core and may have electropositive edge regions, but the electropositive regions become small for the highly electronegative plasma considered here. In the parameter range for which the negative ions are Boltzmann, the electron density in the core is nearly uniform, allowing the nonlinear diffusion equation to be solved in terms of elliptic integrals. If the loss of positive ions to the walls dominates the recombination loss, a simpler parabolic solution can be obtained. If recombination loss dominates the loss to the walls, the assumption that the negative ions are in Boltzmann equilibrium is not justified, requiring coupled differential equations for positive and negative ions. Three parameter ranges are distinguished corresponding to a range in which a parabolic approximation is appropriate, a range for which the recombination significantly modifies the ion profiles, but the electron profile is essentially flat, and a range where the electron density variation influences the solution. The more complete solution of the coupled ion equations with the electrons in Boltzmann equilibrium, but not at constant density, is numerically obtained and compared with the more approximate solutions. The theoretical considerations are illustrated using a plane parallel discharge with chlorine feedstock gas of p = 30, 300 and 2000 mTorr and , corresponding to the three parameter regimes. A heuristic model is constructed which gives reasonably accurate values of the plasma parameters in regimes for which the parabolic profile is not adequate.

Formation of Inverse EDF in Glow Discharges with an Inhomogeneous Electric Field

Specificity of the EEDF formation in a dusty plasma with nonmonotonic profiles of charged particles and reversal ambipolar field

Features of the EEDF Formation in the Dusty Plasma of the Positive Column of a Glow Discharge

Influence of the Ambipolar Field on the Formation of Electron Phase Flows in the Positive Column of a Glow Discharge in a Nitrogen-Like Gas

Longitudinal structure and plasma parameters of an entire DC glow discharge as obtained using a 1D fluid-based model with non-local ionization

Ambipolar Field Role in Formation of Electron Distribution Function in Gas Discharge Plasma.

Numerical Simulation of Static Electric Field in Double Glow Discharge and Edge Effect in Vacuum

Inverse Bremsstrahlung Absorption and the Evolution of Electron Distributions Accounting for Electron-Electron Collisions

Specificities of the Nonlocal EDF Formation in a Dusty Plasma with the Different Spatial Distribution of the Microparticle Density

Electron Trapping by Electric Field Reversals in Glow Discharges

Numerical Simulation for Low Pressure DC Argon Glow Discharge

Evolution of Striation in Pulsed Glow Discharges

Anomalous Glow Discharge between Two Electrodes on the Same Surface in a Transverse Magnetic Field

On Fundamental Inconsistencies in a Commonly Used Modification of a Fluid Model for Glow Discharge

Glow discharge in low pressure plasma PVD: mathematical model and numerical simulations

Gas Discharge Properties of Inverse-Brush-Electrodes Driven by Alternating Current

Electron Kinetics in a Positive Column of AC Discharges in a Dynamic Regime

Electron Kinetic Effects in Atmospheric Dielectric-Barrier Glow Discharges

Modelling plasma discharges at high electronegativity

Influence of Dust Particles on Spatial Distributions of Particles and Fluxes in Positive Column of Glow Discharge

Experimental Study on a Glow Discharge Driven by a Flash Evaporation-Induced Density Gradient From Porous Conductive Liquid Electrodes