Numerical Simulation for Low Pressure DC Argon Glow Discharge

SHAO Xianjun,MA Yue,LI Yaxi,ZHANG Zenghui,ZHANG Guanjun
2010-01-01
Abstract:A one-dimensional self-consistent fluid model of argon glow discharge is established.The convection and diffusion equations are proposed to describe drift-diffuse motions of charged particles in gap and variation process of electron energy.The influence of space charge on electric field and secondary electron emission from cathode surface due to ion bombardment are considered in this discharge model.And the finite-element method(FEM) is adopted for numerical solutions.The evolvement waveform of discharge current with time variety is obtained,and the spatial distributions of charged particles density,total flux density,electron energy and electric field are investigated as the discharge becomes stable.The simulation results show that discharge reaches the stable state after 25 μs computation time;in stable stage of discharge,ion density gets several orders of magnitude higher than electron density near the cathode-fall region,and almost equal in positive column region;electron energy reaches the peak value 29 eV in cathode-fall region and almost keeps constant near the positive column region and negative glow region.In the cathode-fall region,the discharge current density is mainly carried by the argon ions flowing towards the cathode and the secondary electrons which are contributed by the ions.And electrons become the main discharge current carrier in the negative glow and positive column regions.
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