Fabrication and Characterization of Superconducting Multiqubit Device with Niobium Base Layer

Feifan Su,Zhaohua Yang,Shoukuan Zhao,Haisheng Yan,Ziting Wang,Xiaohui Song,Ye Tian,Shiping Zhao
DOI: https://doi.org/10.1088/1674-1056/ac11d7
2021-01-01
Chinese Physics B
Abstract:Superconducting transmon qubits are the leading platform in solid-state quantum computing and quantum simulation applications.In this work,we develop a fabrication process for the transmon multiqubit device with a niobium base layer,shadow-evaporated Josephson junctions,and airbridges across the qubit control lines to suppress crosstalk.Our results show that these multiqubit devices have well-characterized readout resonators,and that the energy relaxation and Ramsey(spin-echo)dephasing times are up to~40 μs and 14(47)μs,respectively.We perform single-qubit gate operations that demonstrate a maximum gate fidelity of 99.97%.In addition,two-qubit vacuum Rabi oscillations are measured to evaluate the coupling strength between qubits,and the crosstalk among qubits is found to be less than 1% with the fabricated airbridges.Further improvements in qubit coherence performance using this fabrication process are also discussed.
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