Abstract:This paper presents a novel decoupled two degrees of freedom (2-DOF) translational parallel micro-positioning stage. The stage consists of a monolithic compliant mechanism driven by two piezoelectric actuators. The end-effector of the stage is connected to the base by four independent kinematic limbs. Two types of compound flexure module are serially connected to provide 2-DOF for each limb. The compound flexure modules and mirror symmetric distribution of the four limbs significantly reduce the input and output cross couplings and the parasitic motions. Based on the stiffness matrix method, static and dynamic models are constructed and optimal design is performed under certain constraints. The finite element analysis results are then given to validate the design model and a prototype of the XY stage is fabricated for performance tests. Open-loop tests show that maximum static and dynamic cross couplings between the two linear motions are below 0.5% and -45 dB, which are low enough to utilize the single-input-single-out control strategies. Finally, according to the identified dynamic model, an inversion-based feedforward controller in conjunction with a proportional-integral-derivative controller is applied to compensate for the nonlinearities and uncertainties. The experimental results show that good positioning and tracking performances are achieved, which verifies the effectiveness of the proposed mechanism and controller design. The resonant frequencies of the loaded stage at 2 kg and 5 kg are 105 Hz and 68 Hz, respectively. Therefore, the performance of the stage is reasonably good in term of a 200 N load capacity.

Design and Testing of a Novel Two-Axial Flexure-Based Vibration Stage

Control Strategy for Multi-Exciter Random Vibration Test

Design and Testing of A 2-Dof Flexure-Based Compliant Stage

Design, Simulation and Development of a Broadband Electromagnetic Angular Vibrator

Design And Analysis Of Two Dimensional X-Y Micropositioning Stage

Design and analysis of a 2-degree-of-freedom flexure-based micro-motion stage

Short Communication: Automated Testing of Accelerometer Transverse Sensitivity with A Flexure-Based Xy Compliant Stage

Dynamic Analysis of a Flexure-Based Compliant Stage

Design and Analysis of a New Flexure-Based XY Stage

Design, optimization, and characterization of an XY nanopositioning stage with multi-level spatial flexure hinges for high-precision large-stroke motion guidance

A Novel Method For Testing Accelerometer Transverse Sensitivity

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

Design and Analysis of a Symmetric Overconstrained Compliant Tilt/Tip Stage Based on a Hybrid Transmission Ratio Model

Design and control of a decoupled two degree of freedom translational parallel micro-positioning stage

Design of a Flexure-Based XY Positioning Stage with Balanced Axial Forces on Decoupling Modules

Flexure-Hinges Guided Nano-Stage for Precision Manipulations: Design, Modeling and Control

Optimization Analysis of Vibration Characteristics for Precision Positioning Stage

A Highly Sensitive Biaxial Resonant Accelerometer with Two-Stage Microleverage Mechanisms

Design and hybrid control of a two-axis flexure-based positioning system

Design of a compact long-stroke high-precision rigid-flexible coupling motion stage driven by linear motor

Design of A Long Stroke Nanopositioning Stage with Self-damping Actuator and Flexure Guide