Abstract:Control of low-concentration pollutants from a semiconductor process vent stream using a wet-scrubbing technique is a challenging task to meet Taiwan environmental emission standards. An efficient wet-scrubber is designed on a pilot scale and tested to control low concentration acid and base waste-gas emission. The scrubber system consisted of two columns, i.e., a fine spray column [cutoff diameter (based on volume), Dv(50) = 15.63 microm; Sauter mean diameter (SMD) = 7.62 microm], which is especially efficient for NH3 removal as the pH of the spraying liquid is approximately 7 followed by a packed column with a scrubbing liquid pH approximately 9.0 mainly for acids removal. It is observed that use of the surfactants in low concentration about 10(-4) M and 10(-7) M in the spray liquid and in the scrubbing liquid, respectively, remarkably enhances the removal efficiency of the system. A traditional packed column (without the spray column and the surfactant) showed that the removal efficiencies of NH3, HF, and HCl for the inlet concentration range 0.2 to 3 ppm were (n = 5) 22.6+/-3.4%, 43.4+/-5.5%, and 40.4+/-7.4%, respectively. The overall efficiencies of the proposed system (the spray column and the packed column) in the presence of the surfactant in the spray liquid and in the scrubbing liquid forthese three species were found to increase significantly (n = 5) from 60.3+/-3.6 to 82.8+/-6.8%, 59.1+/-2.7 to 83.4+/-4.2%, and 56.2+/-7.3 to 81.0+/-6.7%, respectively. In this work, development of charge on the gas-liquid interface due to the surfactants has been measured and discussed. It is concluded that the presence of charge on the gas-liquid interface is the responsible factor for enhancement of the removal efficiency (mass-transfer in liquid phase). The effects of the type of surfactants, their chain length, concentration in liquid, etc. on the removal efficiency are discussed. Since the pilot tests were performed under the operating conditions similar to most of the wet-scrubbers operated in semiconductors manufacturing facilities for inorganic pollutants, this study can be applied to modify the existing wet-scrubbers to enhance the removal efficiencies, especially for low-concentration pollutants.

Performance Evaluation Of A Three-Stage Composite Wet Scrubber For Removing Particulate Matter

Integrated Gas and Solid Model to Determine the Flow Performance in the SCR Reactor

The Synergetic Particles Collection in Three Different Wet Flue Gas Desulfurization Towers: A Pilot-Scale Experimental Investigation

An experimental study on the removal of submicron fly ash and black carbon in a gravitational wet scrubber with electrostatic enhancement

Efficient control system for low-concentration inorganic gases from a process vent stream: application of surfactants in spray and packed columns

Improving Fine Particle Removal Using a Single-Channel Slit Bubbling Device in Wet Flue Gas Desulfurization System

Structured packing improves wet scrubbing of airborne molecular contaminants in cleanroom make-up air units

STUDY ON EFFECTS OF A WET SCRUBBER UPON CONTROLLING THE PAHS EMISSIONS

Theoretical and Experimental Investigation on the Characteristics of Fly‐ash Scrubbing in a Fixed Valve Tray Column

A review of removing SO2 and NOX by wet scrubbing

Removal of Multiple Pollutants in Air Pollution Control Devices of a Coal-Fired Boiler Installed with a Flue Gas Condensation Scrubber

Improving the removal of particles and trace elements from coal-fired power plants by combining a wet phase transition agglomerator with wet electrostatic precipitator

REMOVAL PATTERN OF PARTICULATE MATTER FROM CONDENSING HEAT EXCHANGER AFTER WET DESULFURIZATION OF COAL-FIRED UNIT

Pilot Study on Removal Characteristics of Multiple Pollutants by the Dual Baghouse Filter System

Industrial application and numerical simulation on discrete dynamics of fine particulate matters: Condensational growth, deposition and agglomeration

Analysis of a wet scrubber network in the air remediation of industrial workplaces: benefit for the city air quality

Reduction of environmental chemicals, toxicity and particulate matter in wet scrubber device to achieve zero emissions

Experimental investigation on the synergetic removal of SO3, SO2, and particulate matter in gas-liquid flow-pattern-controlling column coupling with ultrasonic wave

Development and Industrial Application of Wet Phase Transition Agglomerator for Water Recovery and Synergistic Removal of Multiple Pollutants from Flue Gas

Investigation on Fine Particulate Matters Removal by Using Wet Phase Transition Agglomeration Technology Cooperated With Wet Electro Static Precipitator

Determining the Performance for an Integrated Process of COD Removal and CO2 Capture